Comparison ledger
Disco DCS 1440 Automatic Cleaning, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000PYES | |
|---|---|---|
| OEM | Disco | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DCS 1440 Automatic Cleaning | YES 1000P |
| Cited variants |
| — |
| Specifications | ||
| Max workpiece size | ø200 mm / 250 mm square[1] | — |
| Applicable tape frame | DTF2-5, DTF2-6, DTF2-6-1, DTF2-8-1, DTF2-5-1, DTF2-8-1, DTF2-12, DTF2-12-1[1] | — |
| Cleaning method | High pressure cleaning, atomizing cleaning (optional)[1] | — |
| Number of cleaning sequences saved | 8[1] | — |
| Spinner table rotational speed range | 100 ~ 3,000 min⁻¹[1] | — |
| Spinner discharge pressure | 2.0 ~ 11.8 MPa[1] | — |
| Power supply | 200 ~ 240 V AC ±10%, 3-phase[1] | — |
| Power consumption during cleaning | 390 W[1] | — |
| Power consumption during idling | 110 W[1] | — |
| Max power | 2.6 kVA[1] | — |
| Air pressure | 0.5 MPa, fluctuations ±0.01[1] | — |
| Air consumption max flow rate | 216 L/min(ANR)[1] | — |
| Clean air pressure | 0.5 MPa, fluctuations ±0.01[1] | — |
| Average clean air consumption (high pressure cleaning) | 54 L/min(ANR)[1] | — |
| Average clean air consumption (atomizing cleaning) | 98 L/min(ANR)[1] | — |
| Cleaning water feed pressure | 0.2 ~ 0.4 MPa, fluctuations ±0.01[1] | — |
| Cleaning water flow rate (high pressure cleaning) | Max. 200 mL/min (at 11.8 MPa)[1] | — |
| Cleaning water flow rate (atomizing cleaning) | 40 ~ 300 mL/min[1] | — |
| Exhaust duct capacity | 3.0 m³/min[1] | — |
| Machine dimensions (W x D x H) | 400 x 600 x 1,220 mm[1] | — |
| Machine weight | Approx. 130 kg[1] | — |
| Green procurement support | RoHS compliant[1] | — |
| Model | — | 1000P[2] |
| System type | — | Plasma cleaning system[2] |
| Shelf configuration | — | Four 16 x 16 inch shelves[2] |
| Total capacity | — | 1024 square inches[2] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[2] |
| Number of shelves | — | 4[2] |
| Shelf size | — | 16 x 16 inches[2] |
| Power | — | 1000 W[3] |
| Configuration | — | Parallel plate[3] |
| Operation modes | — | Active, RIE, Downstream[2] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[2] |
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