Waferpedia

Comparison ledger

3220versusDAD3220

Disco 3220, Disco DAD3220, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
DAD3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DAD3220
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]0.0001 mm[4]
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
OEM—Disco[3]
Model—DAD3220[3]
Code—SAW3[3]
Location—Sample Prep Room[3]
Max workpiece size—φ6 inch / 150×150 mm (user-specified specification)[4]
X-axis cutting range—160 mm[4]
Cutting speed—0.1 - 500 mm/s[4]
Y-axis cutting range—162 mm[4]
Y-axis positioning accuracy—0.005/160 mm (single error), 0.003/5 mm[4]
Z-axis max stroke—32.2 mm (with φ2 inch blades)[4]
Z-axis moving resolution—0.00005 mm[4]
Z-axis repeatability accuracy—0.001 mm[4]
θ-axis max rotating angle—320 deg[4]
Spindle rated output—1.5 kW[4]
Spindle rated torque—0.48 N·m[4]
Spindle rotation speed range—3,000 - 40,000 min⁻¹[4]
Equipment dimensions (W × D × H)—500 × 900 × 1,670 mm[4]
Equipment weight—Approx. 550 kg[4]
Display—LCD touch panel with graphical user interface[4]
Standard functions—Auto-alignment, auto-focus, auto-kerf check[4]
Spindle lock—Shaft lock function for easier blade changing[4]
Type—Automatic dicing saw[4]
Workpiece size—6-inch / 150 × 150 mm workpieces[4]
Workpiece note—Special specification for 6-inch square workpieces[4]
Spindle count—Single spindle[4]
Equipment width—500 mm[4]
Equipment dimensions—500 × 900 × 1,670 mm[4]
Functions—Auto-alignment, auto-focus, and auto-kerf check[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]smif.pratt.duke.edusmif.pratt.duke.edu
  4. [4]disco.co.jpdisco.co.jp