Comparison ledger
Denton Vacuum 635LL, SPTS MVD100E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 635LLDenton Vacuum | MVD100ESPTS |
|---|---|---|
| OEM | Denton Vacuum | SPTS |
| Category | Deposition | Deposition |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum 635LL | SPTS MVD100E |
| Specifications | ||
| Cathodes | 4-cathodes[1] | — |
| Gas / process feedback | RGA, OES-feedback reactive oxygen or nitrogen sputter[1] | — |
| Chuck temperature | heated/cooled chuck to 500C[1] | — |
| Process mode | co-sputtering[1] | — |
| Substrate size | coats up to 200mm diameter substrates[1] | — |
| Number of cathodes | 4[2] | — |
| Residual gas analysis (RGA) | Included[2] | — |
| Reactive sputtering feedback | OES-feedback reactive oxygen or nitrogen sputter[2] | — |
| Chuck temperature range | Heated/cooled to 500 °C[2] | — |
| Co-sputtering capability | Yes[2] | — |
| Maximum substrate size | 200 mm diameter[2] | — |
| processing mode | — | Single substrate or small batch processing[3] |
| wafer size | — | 200mm wafers[3] |
| substrate handling | — | Components on trays or racks[3] |
| chamber volume | — | Small chamber volume for fast processing[3] |
| access design | — | Top-opening for ease of maintenance and cleaning[3] |
| process capability | — | Integrated plasma surface treatment and chamber clean capability[3] |
| automation | — | Automated process sequence routines[3] |
| diagnostics | — | Exceptional reliability with extensive self-diagnostic and data logging capability[3] |
| capability | — | MVD and ALD-capable[3] |
| Wafer size | — | 200mm[3] |
| Diagnostics | — | Extensive self-diagnostic and data logging capability[3] |
| Deposition capability | — | MVD and ALD-capable[3] |
| Reliability | — | Exceptional reliability[3] |
| Product type | — | Deposition Tool[4] |
| Process type | — | Molecular Vapor Deposition (MVD) system[3] |
| Intended use | — | R&D or pilot manufacturing[3] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →