Comparison ledger
CEE 1000 Hot Plate, Mellen SC12.5R, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SC12.5RMellen | |
|---|---|---|
| OEM | CEE | Mellen |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Mellen SC12.5R |
| Specifications | ||
| Configuration | 4"[1] | — |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | — |
| Equipment type | — | Three zone tube furnace[2] |
| Operation | — | Each capable of independent operation[2] |
| Quantity listed | — | 2[2] |
| Heating zones | — | 3 zones[3] |
| Zone length | — | 3 × 8 in[3] |
| Total length | — | 24 in[3] |
| Maximum temperature per zone | — | 1200 °C[3] |
| Control system | — | MELLEN ADAPT control system[3] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →