Waferpedia

Comparison ledger

1000 Hot Plateversus1700EXL

CEE 1000 Hot Plate, Heller 1700EXL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1700EXLHeller
OEMCEEHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateHeller 1700EXL
Cited variants—
  • Heller 1500EXL[1]
  • Heller 1800EXL[1]
  • Heller 1900EXL[1]
Specifications
Configuration4"[2]—
TypeHot Plate[2]—
Wafer Size4 inch[2]—
Series—EXL Series[1]
Heating zones—Six heating zones[1]
Cooling zones—One internal cooling zone[1]
Profiling—Five thermocouple profiling[1]
Maximum line speed—Up to 32 inches (80 cm) per minute[1]
Control software—Enhanced Windows-based software[1]
Integrated profiling—Integrated KIC thermal profiling[1]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing