Comparison ledger
Buehler MetaServ 3000 Vector LC, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MetaServ 3000 Vector LCBuehler | 12 LapperLapmaster |
|---|---|---|
| OEM | Buehler | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Buehler MetaServ 3000 Vector LC | — |
| Specifications | ||
| Configuration | 50 to 500 rpm[1] | — |
| Voltage | 120 V[1] | — |
| Equipment type | grinder/polisher[2] | — |
| Wafer size | 8 inch[1] | — |
| Speed | 50 to 500 rpm[1] | — |
| Current | 3.5 A[1] | — |
| Power frequency | 50/60 Hz[3] | — |
| Platen | 200 mm platen[3] | — |
| Outside plate diameter | — | 12 inches[4] |
| Lapping Speed Range | — | 0 to 60 rpm[5] |
| Wafer Size Compatibility | — | 4 inches or smaller[4] |
| Input Voltage | — | 110 V[4] |
| Frequency | — | 60 Hz[4] |
| Phase | — | 1[4] |
| Number of Rings | — | 3[4] |
| Number of Weights | — | 3[4] |
| Includes Slurry System | — | Yes[4] |
| Includes Timer | — | Yes[4] |