Waferpedia

Comparison ledger

49 7211versus120 Continuous

Buehler 49 7211, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
49 7211Buehler
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler 49 7211Lapmaster 120 Continuous
Specifications
Phase1 Phase[1]—
Configuration170-264 Vac[1]—
Tool typeChemical mechanical polisher (CMP)[1]—
Electrical phases1 phase[1]—
Input voltage170-264 Vac[1]—
Frequency47/63 Hz[1]—
CategoryCMP[2]—

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com