Comparison ledger
Brooks 017-0146-01 Prealigner, OAI 200 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 200 MaskOAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI 200 Mask |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | Double Sided[2] |
| Model | — | 200[2] |
| Type | — | tabletop mask aligner[1] |
| Resolution | — | one micron[1] |
| Alignment precision | — | one micron[1] |
| Alignment accuracy | — | 2 µm[3] |
| Objectives | — | 5x, 10x, and 2x objectives[3] |
| Exposure modes | — | contact, soft-contact, and proximity[4] |
| Light source options | — | collimated Hg lamp UV light source or UV LED light source[1] |
| UV LED wavelengths | — | 365nm, 405nm, or 436nm[1] |
| Chuck | — | dual windows in chuck for 4" wafers[2] |
| Alignment axes | — | X, Y, and Z micrometers[1] |
| Frontside alignment | — | designed for high-precision frontside alignment in microfabrication processes[3] |
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