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017-0146-01 PrealignerversusFPA 3000 EX 5 Fine Pattern

Brooks 017-0146-01 Prealigner, Canon FPA 3000 EX 5 Fine Pattern, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
FPA 3000 EX 5 Fine PatternCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1998 Vintage · 1999 Vintage
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerCanon FPA 3000
Specifications
Configuration—Cymer ELS 5310[1]
Laser source—Cymer ELS 5310[1]
Chamber—Rasco TWB-CD-110 Compact Chamber[2]
Make—Canon[1]
Model—FPA 3000 EX 5[1]
Equipment type—Fine Pattern Aligner[1]
Vintage—1998[1]
017-0146-01 Prealigner entryFPA 3000 EX 5 Fine Pattern entryAsk about these tools →Share experience with this comparison →

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing