Comparison ledger
Brooks 017-0024-01 Prealigner, GCA 8500 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | 8500 WaferGCA |
|---|---|---|
| OEM | Brooks | GCA |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | GCA 8500 Wafer |
| Specifications | ||
| Configuration | — | 5 Axis[1] |
| Equipment type | — | Commercial wafer stepper[2] |
| OEM | — | GCA[1] |
| Reduction ratio | — | 5x[1] |
| Exposure source | — | i-line[2] |
| Resolution capability | — | Sub-micron features[3] |
| Axis configuration | — | 5-axis[1] |
| Wafer diameter | — | 150 mm[2] |
| Wafer geometry supported | — | 1-flat, 2-flat, notched, no-flat[2] |
| Wafer materials supported | — | Silicon, silicon on insulator[2] |
| Wafer thickness range | — | 500–700 µm[2] |
| Batch size | — | 1 wafer (150 mm)[2] |
| Demonstrated wafer use | — | 6-inch silicon-on-insulator wafer[3] |
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