Waferpedia

Comparison ledger

0 V 500versusATS 195 V LN 2

Blue M 0 V 500, Thermotron ATS 195 V LN 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
ATS 195 V LN 2Thermotron
OEMBlue MThermotron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Thermotron ATS 195
Specifications
Configuration—Hot & Cold[1]
Manufacturer—Thermotron[1]
Model—ATS 195 V LN 2[2]
Category—Thermal / Diffusion[1]
Equipment type—Vertical Thermal Shock Chamber[3]
LN2 capability—LN2[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]thermotron.comthermotron.com