Comparison ledger
Blue M 0 500, SVG 88, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 500Blue M | 88SVG |
|---|---|---|
| OEM | Blue M | SVG |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 500 | SVG 88 |
| Cited variants | — |
|
| Specifications | ||
| Manufacturer | Blue M[2] | — |
| Model | 0 500[2] | — |
| Asset number | 139866[2] | — |
| Last confirm date | September 10, 2025[2] | — |
| Equipment type | Oven[2] | — |
| Configuration | — | Single track[3] |
| Sender indexer | — | coat-bake-receiver indexer[3] |
| Wafer sizes | — | 6 inch, 8 inch[3] |
| Track configuration | — | Single track[3] |
| Included modules | — | Sender indexer, coat module, bake module, receiver indexer[3] |
| Substrate support | — | SiC, Sapphire, Quartz, Ge, GaAs, GaN[1] |
| Dual wafer size upgrade | — | Supported[1] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →