Waferpedia

Comparison ledger

0 500versus1200

Blue M 0 500, Blue M 1200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
1200Blue M
OEMBlue MBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2010 SOP revision date
Control system——
Generation——
FamilyBlue M 0 500Blue M 1200
Cited variants—
Specifications
ManufacturerBlue M[2]—
Model0 500[2]—
Asset number139866[2]—
Last confirm dateSeptember 10, 2025[2]—
Equipment typeOven[2]C box furnace[3]
Type—Box furnace[3]
Maximum temperature—1200 °C[3]
Minimum temperature setpoint—0 °C[3]
Controller—UP150 programmable controller[3]
Maximum program segments—16 segments (SP1–SP16, tM1–tM16)[3]
Program end modes—Reset (shut off), Hold (hold temperature), Repeat (continuous)[3]
Nitrogen flowmeter maximum—13 slpm[3]
PID coefficients—User-settable proportional (p), integral (I), derivative (d) via optimized table[3]
Alarm temperature setting—Typically 10 °C higher than highest process temperature[3]
Temperature rating—1200 C[3]
Operating atmosphere—nitrogen flow[3]
Tube furnace type—split-hinge tube furnace[1]
Tube furnace configuration—horizontal or vertical use[1]
Tube furnace temperature control—independent digital temperature control modules[1]
Tube furnace control type—multisegment[1]
Tube furnace temperature range—100 C to 1200 C[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]thermofisher.comthermofisher.com
  2. [2]Equipment inventory listing
  3. [3]nanofab.utah.edunanofab.utah.edu