Comparison ledger
Axcelis 17099370 Outer strike plate, Axcelis Purion H 200 High Current, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | Purion H 200 High CurrentAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Axcelis Purion H 200 High Current |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | — |
| Manufacturer | Axcelis[2] | Axcelis[3] |
| Model | 17099370 Outer strike plate[1] | Purion H 200[3] |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Tool type | — | High Current Implanter[3] |
| Wafer size | — | 12 inch[3] |
| Tool description | — | single wafer high current implanter[4] |
| Maximum single charge energy range | — | up to 230 keV[4] |
| Maximum accel voltage | — | 170 kV[4] |
| High-current beamline capability | — | greater than 20 mA of beam currents[4] |
| Wafer sizes | — | 12 inch; 6 inch; 200 mm; 150 mm; 300 mm[4] |
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