Waferpedia

Comparison ledger

Versaport 2200 IndexerversusVersaport 2200 SMIF

Asyst Versaport 2200 Indexer, Asyst Versaport 2200 SMIF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAsystAsyst
Category——
Wafer size2nd EPROM has the firmware for wafer cassettes (in spare)—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAsyst Versaport 2200Asyst Versaport 2200
Specifications
P.N9700-5384-01 REV.4- used for both mask cassettes and wafer cassettes[1]—
Configuration2 EPROM chips:[1]With shuttle and back plate[4]
Wafer size2nd EPROM has the firmware for wafer cassettes (in spare)[1]—
ManufacturerAsyst[1]—
ModelVersaport 2200[1]—
Part number9700-5384-01 REV.4[1]—
Cassette type8” Cassette[1]—
Mounting configurationBolt Back Plate[1]—
RFID supportRFID Smart Tag support[1]—
Firmware2 EPROM chips; 1st EPROM has firmware for mask cassettes (installed currently), 2nd EPROM has firmware for wafer cassettes (in spare)[1]—
Cassette compatibilityUsed for both mask cassettes and wafer cassettes[1]—
ConditionRefurbished[1]—
Sensor adjustmentThe user just needs to adjust the sensor parameters via ISIM to work with your cassettes[2]—
Technical manualVersaPort 2200 Technical Manual, P/N 2000-1252-01, Rev. C, dated 6/12/2007[3]—
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]data2.manualslib.comdata2.manualslib.com
  4. [4]inventory listing