Comparison ledger
ASM A 412 LPCVD, Heller 1088, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | A 412 LPCVDASM | 1088Heller |
|---|---|---|
| OEM | ASM | Heller |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASM A 412 LPCVD | Heller 1088 |
| Cited variants | — | |
| Specifications | ||
| Configuration | NITR[1] | — |
| OEM | ASM[1] | — |
| Model | A 412[1] | — |
| Tool type | LPCVD furnace (Low Pressure Chemical Vapor Deposition)[1] | — |
| Wafer size | 12 inch[1] | — |
| Vintage | 2006[1] | — |
| Equipment type | LPCVD Furnace (Low Pressure Chemical Vapor Deposition)[1] | — |
| Heating Zones | — | 8 zones (4 top and 4 below) plus 1 cooling zone[4] |
| Heating Method | — | Forced convection[4] |
| Conveyor Width | — | 18 inches (45 cm)[4] |
| Heated Length | — | 43.5 inches (111 cm)[4] |
| Overall Length | — | 96 inches (244 cm)[4] |
| Height | — | 50 inches (127 cm)[4] |
| Net Weight | — | 900 lbs (409 kg)[4] |
| Thermal Profiler | — | Included[4] |
| Oven Top | — | Counter balance for easy access to conveyor[4] |
| Solder Compatibility | — | Lead-free and leaded soldering[4] |
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