Waferpedia

Comparison ledger

Reflexionversus12 Lapper

Applied Materials Reflexion, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
ReflexionApplied Materials
12 LapperLapmaster
OEMApplied MaterialsLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Reflexion—
Cited variants
  • Reflexion LK[1]
  • Reflexion LK Prime[1]
—
Specifications
ConfigurationDielectric, LK Oxide[2]—
Wafer Sizes12 inch[2]—
Process TypeChemical Mechanical Polishing (CMP)[2]—
OEMApplied Materials[2]—
ModelReflexion[2]—
CategoryCMP (Chemical Mechanical Polisher)[2]—
Wafer Size12 inch[2]—
Outside plate diameter—12 inches[5]
Lapping Speed Range—0 to 60 rpm[6]
Wafer Size Compatibility—4 inches or smaller[5]
Input Voltage—110 V[5]
Frequency—60 Hz[5]
Phase—1[5]
Number of Rings—3[5]
Number of Weights—3[5]
Includes Slurry System—Yes[5]
Includes Timer—Yes[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]patents.google.compatents.google.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]jmind.comjmind.com
  6. [6]etd.ohiolink.eduetd.ohiolink.edu