Comparison ledger
Applied Materials Centura MXP, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Centura MXPApplied Materials | 1512eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Centura MXP | Tegal 1512e |
| Specifications | ||
| Configuration | 3 CH[1] | — |
| Phase | 3 Phase[1] | — |
| Frequency | 50 Hz[1] | — |
| Voltage | 208 VAC[1] | — |
| Wires | Four[2] | — |
| Full Load Current | 240 A[2] | — |
| H/E 1 | 0242-02163 REV D[3] | — |
| UPS | DPWR 35611[3] | — |
| H/E (CH-B_C_D_Wall) | 0242-02163 REV D[3] | — |
| Chambers | 3 CH[1] | — |
| Robot | HP Robot[1] | — |
| Power Supply Voltage | 208 VAC[1] | — |
| Power Supply Frequency | 50 Hz[1] | — |
| Number of Wires | Four / 4 Wires[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[4] |
| Stated configuration | — | With modules assembly for CI-4222[4] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →