Comparison ledger
Applied Materials 0041-39086 ESC Part, SCREEN SU 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | SU 2000SCREEN |
|---|---|---|
| OEM | Applied Materials | SCREEN |
| Category | Etch | Etch |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | SCREEN SU 2000 |
| Specifications | ||
| Wafer size | — | Wafer currently configured for 6"[1] |
| Configuration | — | Under OEM Maintenance[1] |
| Station List | — | Lp, MPC1, MPC2, MPC3, MPC4, Reverser Unit, CR, PF, I/F (N2/air)[1] |
| Chemicals Used | — | Stripper, Qz, ST (also used for NMP in place of one)[1] |
| Application | — | Single wafer spray solvent tool[1] |
| Sation List | — | Lp, MPC1, MPC2, MPC3, MPC4, Reverser Unit, CR, PF, I/F (N2/air)[2] |
| Wafer Size | — | 6 inch, 8 inch[1] |
| Chemicals | — | Stripper, Qz, ST, NMP[1] |
| Vintage | — | 2017[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →