Waferpedia

Comparison ledger

0020 23839 PartversusVector

Applied Materials 0020 23839 Part, Lam Research Vector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
VectorLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartLam Research Vector
Cited variants—
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[2]—
Process—Plasma-Enhanced Chemical Vapor Deposition (PECVD)[1]
Product family—VECTOR Product Family[1]
Wafer size—12 inch[3]
Architecture—Quad station module (QSM)[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]lamresearch.comlamresearch.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing