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0020 18698 PartversusGasonics Vector Express

Applied Materials 0020 18698 Part, Lam Research Gasonics Vector Express, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
Gasonics Vector ExpressLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartLam Research Gasonics Vector
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]TEOS[2]
OEM—Lam / Novellus / Gasonics[2]
Model—Vector Express[2]
System type—PECVD (Plasma-Enhanced Chemical Vapor Deposition)[2]
Wafer size—12 inch[2]
Process—TEOS[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing