Comparison ledger
Applied Materials 0020 18455 Part, Oxford Instruments OpAL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 18455 PartApplied Materials | OpALOxford Instruments |
|---|---|---|
| OEM | Applied Materials | Oxford Instruments |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 18455 Part | Oxford Instruments OpAL |
| Specifications | ||
| Configuration | Shaft,Rf In Local Match, Hdpcvd,Rev3[1] | Single open loop chamber (non-loadlocked)[2] |
| Heated table | — | 80-300ºC[2] |
| Voltage | — | 208V, 3Ph, 60Hz, 25A[2] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →