Waferpedia

Comparison ledger

0020 18455 PartversusVector

Applied Materials 0020 18455 Part, Lam Research Vector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
VectorLam Research
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartLam Research Vector
Cited variants—
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[2]—
Process—Plasma-Enhanced Chemical Vapor Deposition (PECVD)[1]
Product family—VECTOR Product Family[1]
Wafer size—12 inch[3]
Architecture—Quad station module (QSM)[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]lamresearch.comlamresearch.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing