Waferpedia

Comparison ledger

0020 12458 PartversusSSC-1000

Applied Materials 0020 12458 Part, CHA SSC-1000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
OEMApplied MaterialsCHA
CategoryDepositionDeposition
Wafer size—10 in.
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartCHA SSC-1000
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]Multi-station system[2]
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]—
System type—Sputtering System[2]
Wafer size—10 in.[2]
Cathodes—Up to four RF or DC cathodes[2]
Operation—Sputter up or sputter down operation[2]
Fixture—Single-plane, multi-substrate rotating fixture[3]
Shutter—Rotating shutter for pre-deposition and positive thickness cutoff control[3]
Automation—Computer automation[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]chaindustries.comchaindustries.com