Comparison ledger
Applied Materials 0010 47763, Plasma-Therm SLR-770, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | SLR-770Plasma-Therm |
|---|---|---|
| OEM | Applied Materials | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | 2" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Plasma-Therm SLR 770 |
| Specifications | ||
| Configuration | 2nd Source New[1] | — |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | — |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| System type | — | Shuttle lock ICP inductively coupled plasma etch system[4] |
| Controller | — | PC controller[4] |
| Load lock | — | Vacuum load lock with wafer transfer robot[4] |
| Wafer size capability | — | Can process wafers from 2" to 8" depending on which process kit is installed[4] |
| Current configuration | — | Currently configured with 3" kit[4] |
| Thermal transfer | — | Thermal transfer module for effective cooling of substrate utilizing helium backside thermal transfer in conjunction with computer controlled substrate clamping[4] |
| Plasma source | — | High frequency RF-based inductively coupled plasma source capable of high density plasma generation[4] |
| Pressure control | — | Closed loop pressure control[4] |
| Pumping | — | Turbo pump with roughing pump[4] |
| Gas controllers | — | Total of eight MFC gas controllers[4] |
| Previously used gases | — | N2, O2, CHF3, AR, CH4, CL2, BCL3, CF4[4] |
| Included accessory | — | Water chiller[4] |
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