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Comparison ledger

0010-22161 High EFF RF MatchversusFlexiFab

Applied Materials 0010-22161 High EFF RF Match, Solitec FlexiFab, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
FlexiFabSolitec
OEMApplied MaterialsSolitec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchSolitec FlexiFab
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]FlexiFab[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Manufacturer—Solitec[3]
Equipment type—Coater and Developer[4]
Wafer size version—150 mm[4]
Wafer size configuration—6 inches (currently set up)[5]
Wafer handling—Automated[5]
Module configuration—Coater module, developer module, hotplate module, Cybor control module and power supply[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]tarasemi.comtarasemi.com