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Comparison ledger

0010-22161 High EFF RF MatchversusPC2000

Applied Materials 0010-22161 High EFF RF Match, Oxford Instruments PC2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PC2000Oxford Instruments
OEMApplied MaterialsOxford Instruments
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchOxford Instruments PC2000
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
System type—plasma system[3]
User login system—Password controlled user login with different levels of access[3]
Data logging—Continuous system data logging for traceability of each wafer and process run[3]
Communication standard—Fully GEM/SECS compatible[3]
Cluster control—Ability to control a tool cluster from a single interface and PC[3]
Operating system—Windows XP[4]
PLC type—Black PLC (older, not upgradeable)[4]
Software type—Process tool software[3]
Interface—Front-end visual[3]
Recipe management—Yes[3]
User access control—Password-controlled[3]
Communication protocol—GEM/SECS compatible[3]
Host operating system—Windows XP[4]
Customization—Per machine[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]nanofab.utah.edunanofab.utah.edu
  4. [4]mtl.mit.edumtl.mit.edu