Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards XDS 10 Scroll, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | XDS 10 ScrollEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards XDS 10 Scroll |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Maximum displacement (50 Hz) | — | 11.3 m³/h[1] |
| Maximum displacement (60 Hz) | — | 13.4 m³/h[1] |
| Ultimate vacuum (total pressure, 60 Hz) | — | 6×10⁻² mbar / 4.5×10⁻² Torr[1] |
| Inlet connection | — | NW25 (KF25)[1] |
| Outlet connection | — | NW25 (KF25)[1] |
| Weight | — | 24.5 kg (54 lb)[1] |
| Motor power | — | 0.3 kW[1] |
| Noise level | — | 55 dB(A) at 1 m (50 Hz)[1] |
| Vibration | — | <4.5 mm/s (rms)[1] |
| Operating temperature range | — | 10 °C to 40 °C[4] |
| Motor rotational speed (60 Hz) | — | 1730 rpm[4] |
| Dimensions (LxWxH) | — | 427 x 290 x 249 mm[4] |
| Maximum water vapor inlet pressure | — | 35 mbar[1] |