Comparison ledger
Applied Materials 0010-21246 Part, YES 253B-20-2CF-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | YES 253B-20-2CF-2 |
| Cited variants | — |
|
| Specifications | ||
| Product name | — | MKS Type 253B Exhaust Throttle Valve[1] |
| Valve type | — | butterfly valve[1] |
| Function | — | regulates the removal of gas from a vacuum chamber; sealing versions can shut off the removal of gas[1] |
| Compatible controllers | — | Type 651, 652, 152G, or 252 revision D or later controllers[1] |
| Flange types | — | ASA, KF Style ISO, NW Style ISO, CF, JIS[1] |
| Connector | — | 15-pin Type D connector[1] |
| Connector cable length | — | 6-inch pigtail cable[1] |
| Heater operating temperature | — | 80° to 90° C for 20° to 40° C ambient[1] |
| Power input for valve body heater | — | ±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1] |
| Resolution | — | Standard: 1/10,000; Fast Motor Option: 1/2800[1] |
| Shaft seal | — | Viton[1] |
| Speed (open to close) | — | Standard: 7.5 sec; Optional: < 2 sec[1] |
| Valve body operating temperature | — | 0° to 90° C max[1] |
| Valve motor ambient operating temperature | — | 0° to 70° C max[1] |
| Warm-up time | — | 1 hour to 80° C; 2 hours to steady state[1] |
| Differential pressure across valve | — | 1 atm. (15 psig) max[1] |
| Driver/gear assembly width | — | 3.75 in square (95 mm)[1] |
| External leakage at shaft seal | — | 1 x 10-7 scc/sec He[1] |
| Materials exposed to process | — | 316L SS, Viton[1] |
| Closed leak rate for sealing butterfly valves | — | less than 1.3 x 10^-7 scc/sec when new[1] |