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Comparison ledger

0010-18024 Pyrometer AssemblyversusUVision 3 Brightfield

Applied Materials 0010-18024 Pyrometer Assembly, Applied Materials UVision 3 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
UVision 3 BrightfieldApplied Materials
OEMApplied MaterialsApplied Materials
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyApplied Materials UVision
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Loadport - ASYST Isoport[2]
Loading Configuration—FOUP, 2 Positions[2]
Operating Software—Windows XP[3]
SW Version—7.5 I[2]
Inspection type—Brightfield inspection[2]
Illumination source—DUV (deep ultraviolet) laser[4]
Throughput advantage—40% faster than any competitive brightfield inspection tool[4]
Defect detection sensitivity—45nm FEOL and immersion lithography[4]
Laser architecture—Multi-beam DUV laser architecture[4]
Wafer size—300mm[5]
Loading configuration—FOUP-based[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]nanotech-now.comnanotech-now.com
  5. [5]fabsurplus.comfabsurplus.com