Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 9600 BRME Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 9600 BRME MetalLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research TCP 9600 |
| Specifications | ||
| OEM | Applied Materials[1] | Lam Research[3] |
| Model | 0010-16392[1] | 9600 BRME[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Software Version | — | E 2.0.1-88 B[3] |
| CIM | — | Secs, GEM[3] |
| Handler System | — | Robot[3] |
| Factory Interface | — | Open Cassette[3] |
| Category | — | Etch[4] |
| Process | — | Metal Etch[3] |
| Wafer size | — | 8 inch[3] |
| Communication / CIM | — | Secs, GEM[3] |
| Vintage | — | 1998[3] |
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