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0010-16392 ESC Assemblyversus2300

Applied Materials 0010-16392 ESC Assembly, Lam Research 2300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
2300Lam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size—8"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research 2300
Cited variants—
  • Lam 2300 Etch Chamber[1]
  • Lam 2300[2]
  • Lam 2300, 12" KIYO EXP MRT[2]
  • Lam 2300, 12"[3]
  • 2300 Etch Chamber[1]
  • 2300 KIYO EXP MRT[2]
  • 2300[3]
Specifications
OEMApplied Materials[4]Lam Research[1]
Model0010-16392[4]2300[1]
TypeESC Assembly[4]—
Wafer Size300 mm[5]—
Electrode ConfigurationDual[5]—
3 Chambers—Insulating Film, Metal, Ashing[1]
Wafer size—Wafer set up for 8"[1]
Configuration—With Exelan Flex 45 Dielectric Etch Chamber[1]
Wafer sizes supported—8 inch, 12 inch[1]
Chamber configuration—3 chambers: Insulating Film, Metal, Ashing[1]
Wafer setup—Wafer set up for 8 inch[1]
Dielectric etch chamber—Exelan Flex 45 Dielectric Etch Chamber[1]
Included subsystems—HDD & Software included; all pumps, generators & other subsystems included[1]
CE Mark—CE Mark 2023 Vintage[1]
Configuration (12-inch)—KIYO EXP MRT[2]
Category—Etch[1]
Wafer sizes—8 inch, 12 inch[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]spwindustrial.comspwindustrial.com