Waferpedia

Comparison ledger

0010-03254 E ChuckversusOpti-Probe 2600

Applied Materials 0010-03254 E Chuck, Thermawave Opti-Probe 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
Opti-Probe 2600Thermawave
OEMApplied MaterialsThermawave
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family——
Cited variants—
Specifications
Wafer Size Compatibility—4- to 8-inches[2]
Laser—675nm thermoelectrically cooled diode laser[2]
Spectrometry lamp—450 to 840 nm tungsten halogen lamp[2]
BPR range—thick dielectric films > 500A[2]
BPE range—thin dielectric films < 500A[2]
Resolution—150nm[2]
Product type—Thin Film Measurement System[3]
Version—200[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]metrologyequipmentservices.commetrologyequipmentservices.com
  2. [2]nanoxkorea.comnanoxkorea.com
  3. [3]fabsurplus.comfabsurplus.com