Comparison ledger
Applied Materials 0010-03254 E Chuck, MKS 626D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | 626DMKS |
|---|---|---|
| OEM | Applied Materials | MKS |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | MKS 626D |
| Specifications | ||
| Pressure range (Full Scale) | — | 0.1 to 1000 Torr[1] |
| Accuracy | — | 0.25% to 0.50% of Reading[1] |
| Overpressure limit | — | 45 psia (310 kPa)[1] |
| Input voltage | — | ±15 VDC[1] |