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G 10 SiC EPI Reactorversus0020 12458 Part

Aixtron G 10 SiC EPI Reactor, Applied Materials 0020 12458 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron G 10 SiC EPI ReactorApplied Materials 0020 12458 Part
Specifications
ConfigurationSiC CVD Souch G10-SiC 9x150mm[1]Insulator,Side Match,Hdp-Cvd Ultima Plus[3]
OEMAixtron[1]—
ModelG 10 SiC[1]0020 12458[3]
CategoryDeposition[2]—
Process descriptionEpitaxial silicon deposition[2]—
Wafer sizes6, 8 inch[1]—
Asset number—146526[3]
Make—Applied Materials[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing