Comparison ledger
Agilent Cary 50 Scan Spectrophotometer, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Agilent | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent Cary | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Scan speeds up to 24000nm per min.[1] | NIST Traceable[4] |
| Voltage | 115 V[1] | — |
| Make | Agilent / Varian[1] | — |
| Model | Cary 50 Scan[1] | — |
| Instrument type | UV-Vis spectrophotometer[2] | — |
| Optics | Single Beam[2] | — |
| Maximum scan speed | 24,000 nm/min[1] | — |
| Bandwidth | Fixed at 1.5 nm[2] | — |
| Photometric range | ±3.3 Abs[2] | — |
| Weight | 21 kg[2] | — |
| Dimensions (W x D x H) | 500 mm x 590 mm x 205 mm[2] | — |
| Power requirements | +5 V DC <1 A, +12 V DC <1.5 A, -12 V DC <0.25 A[2] | — |
| Control software | Cary WinUV software[2] | — |
| Light source | Xenon flash lamp[2] | — |
| Wavelength range | 190-1100 nm[2] | — |
| Scan speed | Up to 24,000 nm/min[2] | — |
| Spectral bandwidth | Fixed at 1.5 nm[2] | — |
| Data collection rate | 80 points per second[2] | — |
| Power consumption | Maximum 26 W from host PC power supply[2] | — |
| Stray light | ≤1% at 198 nm (KCl), ≤0.05% at 220 nm (NaI), ≤0.05% at 370 nm (NaNO2)[2] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[4] |
| NIST Traceable | — | Yes[4] |
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