Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards E 2 M 2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 2 M 2Edwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards E 2 M 2 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Maximum displacement (50 Hz) | — | 2.8 m³/h[2] |
| Maximum displacement (60 Hz) | — | 3.4 m³/h[2] |
| Pneurop displacement (50 Hz) | — | 2.4 m³/h[2] |
| Pneurop displacement (60 Hz) | — | 2.9 m³/h[2] |
| Ultimate vacuum (partial pressure, no gas-ballast) | — | 2.5×10⁻⁴ mbar[2] |
| Ultimate vacuum (total pressure, no gas-ballast) | — | 1×10⁻³ mbar[2] |
| Ultimate vacuum (partial pressure, full gas-ballast) | — | 3×10⁻² mbar[2] |
| Maximum water vapour inlet pressure | — | 15 mbar[2] |
| Maximum water vapour pumping rate | — | 0.03 kg/h[2] |
| Maximum permitted outlet pressure (at full pump throughput) | — | 0.5 bar gauge[2] |
| Motor rotational speed (50 Hz) | — | 1450 rpm[2] |
| Motor rotational speed (60 Hz) | — | 1750 rpm[2] |
| Recommended oil | — | Ultragrade 19[2] |
| Maximum oil capacity | — | 0.55 litre[2] |
| Dimensions (A x B, single-phase motor variant) | — | 449 mm x 131 mm[2] |
| Ambient temperature range (operation) | — | 12 to 40 °C[2] |
| Ambient temperature range (storage) | — | -30 to 70 °C[2] |