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VHS 250 DiffusionversusVHS 4

Varian VHS 250 Diffusion, Varian VHS 4, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
VHS 250 DiffusionVarian
VHS 4Varian
OEMVarianVarian
CategoryThermal / DiffusionLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian VHSVarian VHS
Specifications
Configuration2200 watts[1]—
Voltage240 V[1]120V, 50/60 Hz[2]
Power2200 watts[1]—
Pumping Speed—1200 l/s[2]
ASA Type Flange—9 in. OD, 5.9 in. ID[2]
Voltage/Frequency—120V, 50/60 Hz[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing