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Comparison ledger

0216 7696, E 11368072 ESCversusE 220 HP

Varian 0216 7696, E 11368072 ESC, Varian E 220 HP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
E 220 HPVarian
OEMVarianVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVarian 0216 7696, E 11368072 ESCVarian E 220 HP
Specifications
ConfigurationPlaten ADV-S Type[1]—
TypeESC Platen ADV-S Type[1]—
CategoryIon Implantation[2]—
Wafer Sizes—6, 8 inch[3]
Year of manufacture—1995[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing