Comparison ledger
SVG 88, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 88SVG | |
|---|---|---|
| OEM | SVG | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SVG 88 | Varian 0332 F 9453 302 Diffusion |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Single track[2] | — |
| Sender indexer | coat-bake-receiver indexer[2] | — |
| Wafer sizes | 6 inch, 8 inch[2] | — |
| Track configuration | Single track[2] | — |
| Included modules | Sender indexer, coat module, bake module, receiver indexer[2] | — |
| Substrate support | SiC, Sapphire, Quartz, Ge, GaAs, GaN[1] | — |
| Dual wafer size upgrade | Supported[1] | — |
| Asset Number | — | 142841[3] |
| Last Confirm Date | — | October 14, 2025[4] |
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