Waferpedia

Comparison ledger

MA 8 BA 8 Gen 4 Pro Maskversus1000 Family

SUSS MicroTec MA 8 BA 8 Gen 4 Pro Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMSUSS MicroTecUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySUSS MicroTec MA 8 BA 8 Gen 4 Pro MaskUltratech 1000 Family
Specifications
Equipment typeMask Aligner / Bonder[1]—
MakeSUSS[1]—
ModelMA 8 / BA 8 Gen 4 Pro[1]—
Vintage2017[1]—
Tool type—Photolithography step-and-repeat 1X stepper[2]
Optical design—Wynne Dyson[2]
Magnification—1X[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]en.wikipedia.orgen.wikipedia.org