Comparison ledger
Strasbaugh 100R16, SUSS MicroTec PA 300 Control, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100R16Strasbaugh | PA 300 ControlSUSS MicroTec |
|---|---|---|
| OEM | Strasbaugh | SUSS MicroTec |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Strasbaugh 100R16 | SUSS MicroTec PA 300 |
| Specifications | ||
| type | 1 spindle grinder/polisher[1] | — |
| drive system | DC drive system with 2 motors[1] | — |
| spindle RPM | 1-180 RPM[1] | — |
| eccentric RPM | 1-90 RPM[1] | — |
| controls | digital timer; air down switch; spindle and eccentric speed dials; air regulators[1] | — |
| capacity | 16 inches[1] | — |
| spindle size | 1-8 TPI[1] | — |
| overall dimensions | 28 inches x 36 inches x 48 inches[1] | — |
| weight | 500 lbs[1] | — |
| origin | made in the USA[1] | — |
| Configuration | — | 500 VA, 115V, 60Hz[2] |
| Category | — | CMP[3] |
| Power | — | 500 VA, 115V, 60Hz[2] |
| Wafer handling | — | 12" Nickel Plated Aluminum Chuck[2] |
| Control & software | — | ATT M300 Temp Control Unit[3] |
| Optics | — | 10X, 2X Mitutoyo Plan Apo Objective, 2ea[2] |
| Configuration & options | — | Cascade CMPS-888 Microscope; Suss PH150 Micropositioner, 4ea[2] |
| Chuck | — | 12-inch nickel plated aluminum chuck[2] |
| Control unit | — | ATT M300 Temp Control Unit[3] |
| Microscope | — | Cascade CMPS-888 Microscope[2] |
| Micropositioners | — | Suss PH150 Micropositioner, 4ea[2] |