Comparison ledger
Semitool 870, Semitool 880, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 870Semitool | 880Semitool |
|---|---|---|
| OEM | Semitool | Semitool |
| Category | Spin Rinser/Dryer | Spin Rinser/Dryer |
| Wafer size | 3" | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 870 | Semitool 880 |
| Specifications | ||
| Tool type | Spin Rinser/Dryer[1] | — |
| Wafer boats | 3" and 4" wafer boats[1] | — |
| Rinse medium | DI water[1] | DI water to 15 MΩ[2] |
| Rinse purity | to 15 MΩ[1] | — |
| Drying method | heated nitrogen[1] | Heated nitrogen[2] |
| Function | — | Spin Rinser/Dryer[2] |
| Boat compatibility | — | 4" and 5" mask boats, plus 6" wafer boat on request[2] |
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