Comparison ledger
Semitool 003163-000 SRD, Tokyo Electron Clean Track Mark 8 Track, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | Clean Track Mark 8 TrackTokyo Electron |
|---|---|---|
| OEM | Semitool | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1994 Manufacturing vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Tokyo Electron Clean Track |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | Clean Track Mark 8[2] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Configuration | — | Panasonic Main Arm Motor[2] |
| Indexer | — | 2 Block Normal Cassette[2] |
| Panasonic Main Arm Motor | — | Included[2] |
| Coater | — | 1[2] |
| Developer | — | 2[2] |
| ADH | — | 1[2] |
| Hot Plates | — | 8 each[2] |
| Cool Plates | — | 3 each[2] |
| WDS | — | 1[2] |
| Vintage | — | 1994[2] |
| Manufacturer | — | Tokyo Electron[2] |
| Category | — | Wet Processing / Clean[3] |
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