Comparison ledger
Semitool 003163-000 SRD, Tokyo Electron Clean Track Lithius i+, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | Clean Track Lithius i+Tokyo Electron |
|---|---|---|
| OEM | Semitool | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Tokyo Electron Clean Track |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | Clean Track Lithius i+[2] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | coater/developer semiconductor manufacturing system[2] |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Configuration | — | 193nm Immersion[2] |
| Manufacturer | — | Tokyo Electron[2] |
| Asset number | — | 74232[3] |
| Last confirm date | — | September 27, 2023[3] |
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