Comparison ledger
Semitool 003163-000 SRD, SUSS MicroTec AS 8 Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | AS 8 SpraySUSS MicroTec |
|---|---|---|
| OEM | Semitool | SUSS MicroTec |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | SUSS MicroTec AS 8 |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | — |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Configuration | — | Semi Automatic[2] |
| Conformal Coating | — | ensures top edge coverage while avoiding resist accumulation in trenches[2] |
| Dual Dispense System | — | up to two separate spray dispense system to prevent cross-contamination[2] |
| Touchscreen Interface | — | equipped with MMC controller software[2] |
| Programmable Recipes | — | all spray and cleaning parameters can be customized and saved[2] |
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