Waferpedia

Comparison ledger

003163-000 SRDversusM 3303 Lift Off

Semitool 003163-000 SRD, SSEC M 3303 Lift Off, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSemitoolSSEC
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 003163-000 SRDSSEC M 3303 Lift Off
Specifications
MakeSemitool[1]—
Model003163-000[1]—
Equipment typeSpin Rinse Dryer (SRD)[1]—
Asset #139375[1]—
Last Confirm DateSeptember 03, 2025[1]—
Voltage—208 VAC[2]
Configuration—Single phase[2]
Frequency—60 Hz[2]
Wafer Size—8 inch[2]
Phase—Single phase[2]
Current—20 A[2]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing