Waferpedia

Comparison ledger

SC 80 BW AV Resistversus1000 Family

SCREEN SC 80 BW AV Resist, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMSCREENUltratech
CategoryLithographyLithography
Wafer sizeLinear Wafer Tracks—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SC 80 BW AV ResistUltratech 1000 Family
Specifications
Wafer sizeLinear Wafer Tracks[1]—
Tool type—Photolithography step-and-repeat 1X stepper[2]
Optical design—Wynne Dyson[2]
Magnification—1X[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]en.wikipedia.orgen.wikipedia.org