Waferpedia

Comparison ledger

LA 820versus0332 F 9453 302 Diffusion

SCREEN LA 820, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
LA 820SCREEN
OEMSCREENVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN LA 820Varian 0332 F 9453 302 Diffusion
Specifications
OEMSCREEN / DNS[1]—
ModelLA 820[1]—
Product CategoryRTP[2]—
Wafer Size6" / 8"[2]—
Equipment DescriptionRapid annealing[2]—
Asset Number—142841[3]
Last Confirm Date—October 14, 2025[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]en.xinlisemi.comen.xinlisemi.com
  3. [3]Equipment inventory listing
  4. [4]fab-spares.comfab-spares.com