Waferpedia

Comparison ledger

56Tversus61T

PR Hoffman 56T, PR Hoffman 61T, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
56TPR Hoffman
61TPR Hoffman
OEMPR HoffmanPR Hoffman
CategoryInsert carrier / lapping carrierInsert carrier / lapping carrier
Wafer size3 in, 4 in, 5 in, 6 in, 8 in, 12 in76mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPR Hoffman 56TPR Hoffman 61T
Specifications
Carrier designation56T[1]—
Mapped machine reference2300 - PR Hoffman[1]—
Equipment typeInsert carriers for double-sided planetary lapping & polishing machines[1]—
Wafer sizes stated on source3 in (76 mm), 4 in (100 mm), 5 in (125 mm), 6 in (150 mm), 8 in (200 mm), 12 in (300 mm)[1]—
Carrier type—61T - Sprocket[1]
Use case—For double-sided planetary lapping & polishing machines[1]
Wafer sizes stated for insert carriers—3 inch, 4 inch, 5 inch, 6 inch, 8 inch, and 12 inch wafers[1]
Maximum insert carrier diameter stated—Up to 33 inches in diameter[1]
Maximum lapping carrier diameter stated—Up to 48 inches in diameter[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org